Edwards iGX100M半導(dǎo)體干泵
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產(chǎn)品名稱: Edwards iGX100M半導(dǎo)體干泵
產(chǎn)品型號(hào): A54612958
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards iGX100M半導(dǎo)體干泵
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Edwards iGX100M Semiconductor Dry Vacuum Pump - NEW
The iGX dry vacuum pump series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.
iGX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.
iGX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure iGX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.
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Peak Speed
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105 m3h-1 / 62 cfm
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Ultimate Pressure
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5.00E-03 mbar / 3.75E-03 Torr
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Power at 700 Torr exhaust
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Ultimate
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1 kW
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AUC (Active Utility Controller)
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0.05 kW
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Water inlet
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1 slm
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Nitrogen
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0 slm
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Footprint excluding exhaust
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0.20 m2
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Weight
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120 kg
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Inlet connectiom
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ISO63
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Outlet connection
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NW25
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Noise at ultimate
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< 55 dB(A)
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Edwards iGX100M Semiconductor Dry Vacuum Pump - NEW
A54612958 / A546-12-958 iGX100M 200-230V 50/60 Hz
A54612959 / A546-12-959 iGX100M 380-460V 50/60 Hz
